We have designed an in-situ optical emission spectrometer with an optical fiber probe. This system consists of four optical fiber connected spectrometers for convenient and flexible on-line monitoring. The spectrometers cover a wavelength range 200 to 1100 nm, with resolution of 0.45 to 0.55 nm. It contains wavelength and intensity calibration kits, data acquisition and control software, as well as an interface with AEC’s expert software systems.
The system is capable of:
- Calibration based on extensive database
- Detection of processes degradation to comprehend the drift in the processes due to time dependent environmental effects
- Fault and impurity trace identification
- Quantitative multi-element identification and
- Real-time decision making
This system has been demonstrated in analysis of semiconductor etching process in a reactor measured by optical emission spectrometer, (K. T. Lu and Dennis Baba, in Abstract of Pittcon ’98, #1015, New Orleans, LA, March 1-5, 1998). The system is capable of quantitative determination of the spectral degradation due to the time dependent drift in the reactor. The whole process, including calibration, analysis and identification, takes less than two minutes. Therefore, the software system can be used for real-time application.
This system has wide range of applications including nanomaterial processing, environmental characterization, laser technology, astrophysics, plasma diagnostics, laboratory analytic chemistry, energy research, IC, and polymer material processing.
Our products and services have been demonstrated successfully in the following areas of application: publication and demonstration and material processing.